在硅外延工藝中，三氯氫硅的純度和質(zhì)量直接影響外延層的質(zhì)量和性能。因此，對(duì)硅外延用三氯氫硅進(jìn)行嚴(yán)格的檢測(cè)是確保硅片質(zhì)量的關(guān)鍵。
浩瀚色譜利用氣相色譜儀對(duì)三氯氫硅中的氯硅烷進(jìn)行了分析檢測(cè)。靈敏度最高;利用標(biāo)準(zhǔn)物質(zhì)以及同系物沸點(diǎn)規(guī)律對(duì)三氯氫硅中的氯硅烷進(jìn)行了準(zhǔn)確定性。
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名稱：15%DC-550/101白色擔(dān)體填充柱
規(guī)格：3m*1/8，60-80目
zui高使用溫度：240°C
應(yīng)用：工業(yè)三氯氫硅的測(cè)定
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適用于：
安捷倫490在線/便攜，4890,5890,6890,7820,7890,8860,8890
島津GC-14C，GC-2010，GC-2014，GC-2030
賽默飛1310,1300,1610,1600
瓦里安3800系列
布魯克PE580,590,680,690
磐諾A90，福立GC9790，華愛(ài)，天瑞，天美，GC7900，川儀，北分瑞利，東西電子，魯南瑞虹，捷島/科曉
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In the silicon epitaxial process, the purity and quality of trichlorosilane directly affect the quality and performance of the epitaxial layer. Therefore, strict testing of trichlorosilane for silicon extension is the key to ensuring the quality of silicon wafers.
Haohan Chromatography used gas chromatography to analyze and detect chlorosilanes in trichlorosilane. The highest sensitivity; Accurate qualitative analysis of chlorosilane in trichlorosilane was carried out using standard substances and boiling point rules of homologues.
Name: 15% DC-550/101 white support filling column
Specification: 3m * 1/8, 60-80 mesh
Maximum operating temperature: 240 ° C
Application: Determination of industrial trichlorosilane
Applicable to:
Agilent 490 online/portable, 48905890689088608890
Shimadzu GC-14C, GC-2010, GC-2014, GC-2030
Thermo Fisher Scientific 1310130016101600
Varian 3800 Series
Brooke PE580590680690
Panno A90, Fuli GC9790, Huaai, Tianrui, Tianmei, GC7900， Chuanyi, Beifen Ruili, Dongxi Electronics, Lunan Ruihong, Jiedao/Kexiao
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